1. Identity statement | |
Reference Type | Journal Article |
Site | mtc-m21c.sid.inpe.br |
Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
Identifier | 8JMKD3MGP3W34R/3RPNPN2 |
Repository | sid.inpe.br/mtc-m21c/2018/09.06.16.12 (restricted access) |
Last Update | 2018:09.06.16.12.26 (UTC) simone |
Metadata Repository | sid.inpe.br/mtc-m21c/2018/09.06.16.12.26 |
Metadata Last Update | 2019:01.14.17.06.34 (UTC) administrator |
DOI | 10.1063/1.5040588 |
ISSN | 2158-3226 |
Citation Key | UedaSouzMariPich:2018:OvShOv |
Title | Overcoming sheaths overlapping in a small diameter metallic tube with one end closed and using a high density plasma from a high power pulsed hollow cathode discharge |
Year | 2018 |
Month | Aug. |
Access Date | 2024, May 19 |
Type of Work | journal article |
Secondary Type | PRE PI |
Number of Files | 1 |
Size | 3538 KiB |
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2. Context | |
Author | 1 Ueda, Mário 2 Souza, G. B. de 3 Mariano, Samantha de Fátima Magalhães 4 Pichon, L. |
Resume Identifier | 1 8JMKD3MGP5W/3C9JHSB |
Group | 1 LABAP-COCTE-INPE-MCTIC-GOV-BR 2 3 CMS-ETES-SESPG-INPE-MCTIC-GOV-BR |
Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Universidade Estadual de Ponta Grossa 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Institut Pprime - CNRS -Universite de Poitiers-ENSM |
Author e-Mail Address | 1 mario.ueda@inpe.br |
Journal | AIP Advances |
Volume | 8 |
Number | 1 |
Pages | e085103 |
Secondary Mark | B4_MEDICINA_II B5_MATERIAIS B5_FARMÁCIA B5_ENGENHARIAS_IV C_INTERDISCIPLINAR C_ASTRONOMIA_/_FÍSICA |
History (UTC) | 2018-09-06 16:13:13 :: simone -> administrator :: 2018 2019-01-04 16:57:10 :: administrator -> simone :: 2018 2019-01-04 17:54:31 :: simone -> administrator :: 2018 2019-01-14 17:06:34 :: administrator -> simone :: 2018 |
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3. Content and structure | |
Is the master or a copy? | is the master |
Content Stage | completed |
Transferable | 1 |
Content Type | External Contribution |
Version Type | publisher |
Abstract | High voltage sheaths are formed when plasmas are produced by application of high negative voltage pulses to conductive supports or components, as in Plasma Immersion Ion Implantation (PIII) treatments of materials surfaces. For parts with concave shape, as inside metal tubes, these sheaths behave quite differently according to the tube configuration and size, as well as, PIII treatment pressure of operation and pulsing parameters. In this work, an SS304 tube of 1.1 cm internal diameter and 20 cm length was pulsed typically at -0.5 to -2.6 kV, 20 µs pulse length, 500 Hz repetition rate, nitrogen pressure of 5x10-2 mbar and with one side closed configuration. Different currents (between 10 and 30 A) were used to produce plasmas with sheaths that overlapped or not, depending on the currents used. To study these sheath behaviors, a simple plasma diagnostic technique based on a bi-dimensional mapping of the deposition of sputtered materials and by etching via the plasma on a Si wafer target surface, both coming out from the tube, was used. This mapping showed clearly the border line situation between overlapping and non-overlapping sheaths in that small tube which allowed to estimate the plasma density to be around 1011 cm-3 at such a sheath condition, as previously anticipated by Sheridan. Above that border condition, nitrogen PIII was successfully obtained in such a small tube of SS304, producing TiN and Ti2N in samples of Ti6Al4V placed inside the tube, when temperatures higher than 800◦C were reached there. Below the border, no significant uptake of nitrogen was possible. Using this type of experimental set-up, it is now possible to explore different hollow cathode behaviors, efficient or high temperature (above 800◦C) PIII conditions and also new utilizations of the plasma ejected from the tube. |
Area | FISPLASMA |
Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Overcoming sheaths overlapping... |
Arrangement 2 | urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > Overcoming sheaths overlapping... |
doc Directory Content | access |
source Directory Content | there are no files |
agreement Directory Content | |
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4. Conditions of access and use | |
Language | en |
Target File | ueda_overcoming.pdf |
User Group | simone |
Reader Group | administrator simone |
Visibility | shown |
Read Permission | deny from all and allow from 150.163 |
Update Permission | not transferred |
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5. Allied materials | |
Next Higher Units | 8JMKD3MGPCW/3ET2RFS 8JMKD3MGPCW/3F358GL |
Citing Item List | sid.inpe.br/bibdigital/2013/09.25.21.49 3 sid.inpe.br/bibdigital/2013/10.14.21.39 3 sid.inpe.br/mtc-m21/2012/07.13.14.56.06 1 |
Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
Host Collection | urlib.net/www/2017/11.22.19.04 |
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6. Notes | |
Empty Fields | alternatejournal archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn keywords label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url |
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7. Description control | |
e-Mail (login) | simone |
update | |
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